Diffraction Grating - DOE - Metasurface - Linear Encoder Grating
- Optical property design, large-area holographic-direct write lithography equipment
- Beam combining/splitting, Littrow, positioning encoder, metasurface, pulse compression grating, liquid crystal grating
- Ultra-high stability subwavelength holographic lithography process
- Grating characteristic simulation design + PVD + etching + testing
- Grating period > 200 nm (diffraction efficiency: 30%~98%)
- Linear encoder grating: 2 μm~20 μm @ meter-scale length
